XY-TEK's Sensors' Typical Applications in Semiconductor Industry

The fluids used in the semiconductor and electronic component manufacturing industry are either corrosive or ultrapure, such as solvents, acids, caustics, cleaning agents, ultrapure and deionized water. Fluid management and handling in the semiconductor industry require devices that are accurate and repeatable, and they have to meet the highest standards for purity and cleanliness.

XY-TEK’s ultrasonic clamp-on flow sensors can be mounted outside the plastic (PTFE, Teflon, PFA) tube or pipe, so there is no intrusion or direct media contact, eliminating the possibility of leaks and contaminations. Moreover, costly process stops for installation are not necessary since our clamp-on flow sensors don’t require cutting the tube or pipe for integration and they are virtually maintenance-free.    

Typical applications:

    * Verification of pump and valve performance

    * Measurement of ultrapure water flow and volume

    * Metering circuit board rinsing systems

    * Monitoring hydrofluoric acid systems

    * Calculation of waste water discharges

    * Measurement of precipitants, reducing and replacement agents
    * Managing of Chemical Mechanical Planarisation (CMP) fluids